#  Facilities 

 



Our laboratory is housed on the G and B levels of the LISE (Laboratory for Integrated Science and Engineering) building, as well as the B level of Pierce Hall. It features state-of-the-art equipment dedicated to the fabrication, imaging, and characterization of nanoscale structures and quantum materials, with a specialized emphasis on advanced scanning near-field microscopy techniques (e.g., cryogenic s-SNOM).

Complementary characterization tools include a broad suite of scanning probe microscopies (AFM, PFM, MFM, KPFM, STM, PiFM, AFM‑IR), as well as TEM, SEM, EDX, XRD, XPS, SIMS, EELS, SQUID magnetometry, Raman spectroscopy, ellipsometry, ultrafast pump–probe, and nonlinear spectroscopies.

As part of Harvard’s Center for Nanoscale Systems (CNS), we also leverage a variety of shared research facilities, including the Harvard Laukien-Purcell Instrumentation Center, the Harvard Center for Crystallographic Studies, and the Oak Ridge National Laboratory’s Center for Nanophase Materials Sciences (CNMS), among others.



 

##  Key Tools 

**Scanning Probe Microscopy**  
[Scattering-Scanning Near-field Optical Microscope (s-SNOM)](https://cns1.rc.fas.harvard.edu/tool-details?id=2486)  
[Photo-Induced Force Microscope](https://cns1.rc.fas.harvard.edu/tool-details?id=2465)  
[JPK Nanowizard AFM](https://cns1.rc.fas.harvard.edu/tool-details?id=2608)  
[Asylum-2 MFP-3D Coax AFM](https://cns1.rc.fas.harvard.edu/tool-details?id=2223)  
[Cypher AFM](https://cns1.rc.fas.harvard.edu/tool-details?id=2444)  
[Jupiter AFM](https://cns1.rc.fas.harvard.edu/tool-details?id=2587)  
  
**Spectroscopy**  
[Woollam RC2 Spectroscopic Ellipsometer](https://cns1.rc.fas.harvard.edu/tool-details?id=2642)  
[Bruker FT-IR Microscope](https://cns1.rc.fas.harvard.edu/tool-details?id=2416)  
[Multiphoton Microscope](https://cns1.rc.fas.harvard.edu/tool-details?id=2561)  
[Hyperspectral Darkfield Raman Microscope](https://cns1.rc.fas.harvard.edu/tool-details?id=2491)  
[Horiba Multiline Raman Spectrometer](https://cns1.rc.fas.harvard.edu/tool-details?id=2441)  
[Micra Femtosecond Laser](https://cns1.rc.fas.harvard.edu/tool-details?id=2471)  
[UV/VIS spectrometer](https://cns1.rc.fas.harvard.edu/tool-details?id=2413)

**Nanofabrication**  
[2D Materials Stacking System](https://cns1.rc.fas.harvard.edu/tool-details?id=2664)  
[Elionix BODEN 150 Electron Beam Lithography](https://cns1.rc.fas.harvard.edu/tool-details?id=2663)  
[Maskless Aligner MLA-2 (direct-write photolithography)](https://cns1.rc.fas.harvard.edu/tool-details?id=2643)  
[STS ICP Reactive Ion Etching](https://cns1.rc.fas.harvard.edu/tool-details?id=2249)  
[PVD E-Beam Deposition System](https://cns1.rc.fas.harvard.edu/tool-details?id=2519)  
[Focused Ion Beam (FEB) Helios](https://cns1.rc.fas.harvard.edu/tool-details?id=2442)  
[Sputtering System](https://cns1.rc.fas.harvard.edu/tool-details?id=2329)

**Electron Microscopy**  
[JEOL ARM 200F STEM](https://cns1.rc.fas.harvard.edu/tool-details?id=2459)  
[JEOL F200 TEM](https://cns1.rc.fas.harvard.edu/tool-details?id=2644)  
[Scanning Electron Microscope (SEM) Hitachi](https://cns1.rc.fas.harvard.edu/tool-details?id=2485)  
[SPECS Aberration Corrected Low Energy Electron Microscope](https://cns1.rc.fas.harvard.edu/tool-details?id=2632)  
  
**X-ray Analysis**  
[Thermo Scientific K-Alpha+ X-ray Photoelectron Spectroscopy (XPS)](https://cns1.rc.fas.harvard.edu/tool-details?id=2464)  
[Thermo Scientific Nexsa X-ray Photoelectron Spectroscopy (XPS)](https://cns1.rc.fas.harvard.edu/tool-details?id=2504)   
[Zeiss X-ray Microscope](https://cns1.rc.fas.harvard.edu/tool-details?id=2232)  
[Micro-CT System](https://cns1.rc.fas.harvard.edu/tool-details?id=2232)  
[Micro-XRF system](https://cns1.rc.fas.harvard.edu/tool-details?id=2790)  
[Single Crystal XRD](https://www.bruker.com/en/products-and-solutions/diffractometers-and-x-ray-microscopes/single-crystal-x-ray-diffractometers/d8-venture.html)

**Electric &amp; Magnetic Characterization**   
[Signatone Probe Station](https://cns1.rc.fas.harvard.edu/tool-details?id=2611)  
[Quantum Design Physical Property Measurement](https://qdusa.com/products/ppms.html)  
[Electron Paramagnetic Resonance Spectroscopy](https://www.bruker.com/en/products-and-solutions/mr/epr-instruments/epr-research-instruments/Elexsys-II-E500-CW-EPR.html?utm_source=Advertising&utm_medium=GoogleAd&utm_campaign=BBIO-AcaGov-AIC-NMR-ELEXSYSE500-H2-2025&gad_source=1&gad_campaignid=15154756976&gbraid=0AAAAADsq6H2Zqrt-GDurpjJvY_ZlXPEyZ&gclid=CjwKCAiA8vXIBhAtEiwAf3B-gxDMkhR9RcxO1P12jb1Rr4nE5U_5a7UBHlNdj0kZ7sNfooJZp5e2tBoCQkMQAvD_BwE)  
[SQUID Magnetometer](https://qdusa.com/products/mpms3.html)

 

 



  [### Research

 ](/research) 

   ![Research directions](/sites/g/files/omnuum12601/files/styles/hwp_16_9__480x270/public/2025-11/Research%20directions.jpg?itok=vusVT0s_) 

 



 

 

  

 

 

 

 

 

At Harvard, we established the university’s first cryogenic s-SNOM system to investigate novel phenomena in low-dimensional quantum materials. This platform uniquely integrates state-of-the-art s-SNOM technology with cryogenic capabilities, broadband laser sources, and in situ electric fields—making it **one of fewer than 20 such systems worldwide**. It enables comprehensive analysis of quantum materials across multiple length, frequency, and energy scales, which is crucial for probing quasiparticle reconstruction, topology, and correlated-electron excitations.



 



      ![The cryogenic scanning near-field optical microscopy setup](/sites/g/files/omnuum12601/files/styles/hwp_1_1__480x480/public/2025-11/Cryo-SNOM.jpg?itok=dCUk454T)